W.-J. Chung, C.-K. Park, D.-S. Hong, D.-Y. Kim, J.-R. Kwon, and B.-S. Park (Korea)
Genetic Algorithm, Acceleration, Optimization, Crane
This paper presents a new optimization technique of acceleration curve for a wafer transfer crane movement in which high speed and low vibration are desirable. This technique is based on a genetic algorithm with a penalty function for acceleration optimization under the assumption that an initial profile of acceleration curves constitutes the first generation of the genetic algorithm. Especially the penalty function consists of the violation of constraints and the number of violated constraints. The proposed penalty function makes the convergence rate of optimization process using the genetic algorithm more faster than the case of genetic algorithm without a penalty function. The optimized acceleration of the crane through the genetic algorithm and commercial dynamic analysis software has shown to have accurate movement and low vibration.
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